湿法工艺系统
金属剥离，显影，清洗，去胶
SUSS可以提供一系列的湿法工艺手段，例如金属剥离、喷淋显影、清洗和光刻胶去除。SUSS的湿法工艺系统是研发型、大学及初创公司的理想工具。
Automated Spin Coaters and Spray Coaters
Highly automated, modular spin and spray coaters for wafers up to 300mm - 3D-Integration, Wafer Bumping, Wafer Level Packaging, MEMS, Compound Semiconductor.
Gamma (up to 200mm)
ACS200Plus (up to 200mm)
ACS300 Gen2 (up to 300mm)
Manual Wet Processing Equipment
The Delta series offers a variety of wet processes such as spray develop, lift-off or puddle develop. Delta systems are the perfect tool for R&D, universities and start-up companies for MEMS, wafer level packaging, 3D-Integration, compound semiconductor.
Delta 12AQ (up to 300mm)
Delta 12L (up to 300mm)