SUSS MicroTec and STS Announce Seminar Series in Asia on Innovative Process Solutions for 3D Integration

Garching, GERMANY, October 28th, 2008 - SUSS MicroTec and Surface Technology Systems, two leading providers of process and test solutions for the semiconductor industry are hosting an advanced technology roadshow in five major cities in Asia from October 29 to November 7. The series of one-day events is building on the success of the US roadshow this spring and will provide a comprehensive overview of the latest developments in the field of 3D Integration and Advanced Packaging.

Invited speakers from companies such as Panasonic, IBM and Fraunhofer IZM will discuss the optimization of integrated process solutions in respect to performance and cost. Topics cover applications like plasma-dicing, metal-to-metal wafer-level bonding, electrostatic carriers for thin wafer handling, as well as thin chip integration. SUSS MicroTec with STS and their parent company Sumitomo Precision Products Co., Ltd (SPP), will demonstrate leading-edge total process solutions for 3D wafer level packaging by combining the expertise of STS and SPP in deep reactive ion etch (DRIE) for via fabrication and SUSS MicroTec in photolithography and wafer bonding.

The roadshow will take place at following dates and locations:

Tokyo, Japan: October, 29
Shanghai, China: October, 31
Seoul, South Korea: November, 3
Hsinchu, Taiwan: November, 5
Singapore: November, 7

Further information is available at www.suss.com/roadshow

About Surface Technology Systems plc

STS designs and manufactures a range of highly specialized systems incorporating innovative technology used in the production of semiconductors and related devices and is a leader in plasma based etch and deposition technologies for processing non ‘mainstream’ semiconductor devices. STS serves a range of applications in several emerging sectors within the telecommunications, data storage, advanced packaging, MEMS and Nanotechnology.

STS is the market leader in deep silicon etching for the growing MEMS market, offering patent-protected technology. In addition, STS has a strong presence in each of its other served markets and distributes its process solutions worldwide through an experienced sales and service operation. The Company, a wholly-owned subsidiary of Sumitomo Precision Products Co., Ltd, currently markets in over 30 countries and has an installed base of over 900 systems.

For more information, please go to www.stsystems.com

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