SUSS MicroTec's ASx Series is the photomask processing platform for 250nm to 90nm technology nodes.
Dedicated Mask Aligner Solution for High Volume Production of Compound Semiconductors Devices
MaskTrack is a multi-purpose, fully-automated platform for imprint mask cleaning and critical photomask processing: Post Exposure Bake, Develop, Strip and Clean.
SUSS MicroTec's, MaskTrack Pro is family of products that solves Next Generation Lithography roadmap requirements for Clean, Bake and Develop.
Near Field Holography (NFH) is a cost-efficient method to create extremely tiny structured optical gratings (pitch between 200 and 600nm) with grating constants down to 200 nm (i.e. lines and spaces of 100 nm)