SÜSS MicroTec AG
Schleissheimer Str. 90
85748 Garching

Tel.:+49 89 32007-0
Fax: +49 89 32007-162
Fax. Nr. for Voting Rights Announcements:
+49 (0)89 32007 444



The SUSS MicroTec Group is a leading supplier of equipment and process solutions for microstructuring applications with more than sixty years of engineering experience.

The solution portfolio covers all performance relevant steps for wafer processing:


The production of memory chips, cameras for mobile phones or tire pressure sensors – the equipment solutions of SUSS MicroTec are applied within a wide variety of manufacturing processes for applications of daily or industrial use. Customers in the semiconductor industry and related markets like MEMS and LED appreciate our comprehensive experience in wafer processing. This makes us a valuable partner for high-volume production as well as for research and development.

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