Innovation for Tomorrow’s World

MEMS - the combination of mechanical functions (sensing, moving, heating) and electrical functions (switching, deciding) on the same chip using microfabrication technology. The same basic process steps for making conventional electronic circuits (patterning, etching, doping, connecting) are used to create mechanical functionality on materials such as silicon and glass.

Micro-Electro-Mechanical Systems (MEMS) have a significant impact across a wide application range from automotive and industrial process control sensors to consumer products.

Examples for such devices are accelerometers for airbag deployment, digital mirrors for optical projection systems, pressure sensors, ink jet heads, hard disk drives, tunable filters for RF-technology or silicon microphones.

All these devices need equipment for fabrication and assembly. With a complete range of process equipment for MEMS, SUSS MicroTec has positioned itself as the leader in high-yield MEMS manufacturing, and thus a primary supplier of innovative equipment solutions for the MEMS market.

Enabling Equipment

• Thick Resist Coating
• Lift-off
• 1X full field lithography
• Wafer Bonder
• Alignment Verification

• Enabling next-generation MEMS devices with metal eutectic bonding
• Latest Metal Technologies for 3D Integration and MEMS Wafer Level Bonding

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