LithographyPlus
Tamarack Scientific Co., Inc. is now a SÜSS MicroTec AG Company.
SUSS MicroTec offers a broad product range to meet the different price and performance points required by the industry.
Proximity
- Up to 300 mm wafers
- Customized illumination
- High throughput
- Resolution down to 3 μm
- Sub-micron alignment
Projection
- Up to 450 x 500 mm substrates
- Full-field 1 x scan or step & repeat
- Large depth of focus
- Resolution down to 2 μm
- Sub-micron alignment
Laser Structuring
- High throughput, non-thermal removal of metals, dielectrics and organics
- Feature size to 2 μm, vias to 1 μm
- High precision sub-micron alignment
- Wafers to 450 mm, substrates to 800 x 800 mm
- Process versatility - ablate, anneal, texture, de-bond
Nanoimprint
- For small and large areas
- Hard and soft stamps
- Easy change from standard aligner operations to nanoimprint lithography
- UV-NIL for sub 50 nm geometries
- SCIL for up to 200 mm wafers
Micro Optics
- High-quality high-performance micro-optics
- Diffractive and refractive optical elements
- Fiber coupling elements for telecom
- Laser beam shaping and homogenizing
- Wafer-Level Optics
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