MEMS / 3D MEMS

MEMS (MicroElectroMechanical Systems) are key components in many automotive, industrial, medical, aerospace and consumer applications. MEMS sensors are used in anything from gaming, smartphones, medical testing to satellites. The applications seem unlimited. MEMS are everywhere.

Although based on commonly used Silicon wafer processing the manufacturing of MEMS devices requires highly specialized equipment to create mechanical structures that are a fraction of the width of a human hair. Highly flexible exposure and coating systems as well as wafer bonding equipment are essential in the processing of MEMS. From the start of volume manufacturing of MEMS products, SUSS MicroTec has been supplying equipment to the MEMS industry worldwide.

Process Technologies

TechnologyProduct
Spin Coater
Mask Aligner, Projection Lithography Equipment
Developer
Wafer Bonder

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