Fan-Out Wafer-Level Package

Fan-out wafer-level packaging (FO WLP) represents a sort of compromise between die-level packaging and wafer-level packaging. The semiconductor wafer is diced and the singulated ICs are embedded in a new “artificial” wafer. On embedding, enough space has to be ensured between the individual dice to allow for the fan-out redistribution layer (RDL).

Unique feature: More than one die can be integrated in a single WLP by stacking.

Process Technologies

TechnologyProduct
Mask Aligner, Projection Scanner
Developer
Excimer Laser Processing Systems,
Solid State Laser Processing Systems
Wafer Bonder
Spin Coater, Spray Coater

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