LithoFab200

Lithography Cluster for Compound Semiconductor and MEMS Devices

The LithoFab200 is a fully clustered lithography solution consisting of an MA200 Compact mask aligner and an ACS200Plus coat/bake/develop module. The modular, free configurable design of the cluster cells allows the machine to be customized according to the customer's specific process flow. Both machines, aligner and coater, can also be run independently in stand-alone mode.

Downloads & Contact

MA200 Compact Brochure	ACS200 Plus Brochure