MA/BA Gen4 Pro Series

Highly Versatile Mask and Bond Aligner for Industrial Research and Production

The MA/BA Gen4 Pro mask and bond aligner is the all-rounder of all SUSS MicroTec's semi-automated mask aligners, and thus offers a wide range of application possibilities. It supports substrate sizes of up to 150 mm and 200 mm. Thanks to numerous tools and options, as well as settable process parameters, it offers maximum flexibility for research and development or production processes. A fully developed design and leading edge technology make the MA/BA Gen4 Pro series the ideal platform to develop future technology. Thus setting new standards for MEMS, advanced packaging, 3D integration and compound semiconductor applications.


  • High alignment precision and resolution
  • Large process range
  • Maximum process control

Downloads & Contact