MA/BA8 Gen3

More information

Because of their ability to easily process virtually all kinds of wafer and substrate materials, manual aligners are increasingly used in production environments. With the new MA/BA8 Gen3 SUSS MicroTec addresses the growing demand for tighter process control coupled with high yield. The MA/BA8 Gen3 is a highly versatile system for R&D and operator-assisted production. In addition it allows easy and fast upgrades to complementary technologies.

Product Features & Highlights

  • High resolution (HR) optics allow patterning of structures below 0.5µm
  • Operator assisted and auto alignment permits <0.25 µm alignment accuracy
  • Advanced semi-automatic functions for maximum process control
  • Processes compatibility with automated equipment
  • Optimized splitfield microscope with eyepieces. Direct viewing and/or LCD flat screen options possible
  • Offers a large variety of options