DirectAlign

With a guaranteed alignment accuracy of 0.5µ (3 sigma), DirectAlign increases the process window for a variety of applications, especially addressing gold bump applications. DirectAlign is available on SUSS MicroTec's MA100/150e, MA200 Compact and MA300 Gen2 production mask aligners. In addition to DirectAlign the new mask aligner generation from SUSS MicroTec can be equipped with technologies that significantly increase throughput, achieve one micron resolution and reduce lithography costs by up to 66 percent (compared to steppers) for those cost-sensitive applications.