Local Cleanroom Concept

Flow Box

A particle-free environment has a positive effect both on process stability and product quality, contributing to increased effectivity as well as cost reduction. For example, for the production of micro-structures, the MA200 Compact can be supplied with a mobile cleanroom flow box fully incapsulating the critical process environment and thereby enabling new processing possibilities.

SMIF Boxes

An alternative to conventional cleanrooms are so-called SMIF (standard mechanical interface) boxes, hermetically sealed wafer cases (so-called mini-environments) allowing wafer loading, unloading and transporting in an ultra-clean environment. The SMIF interface is available as an option for the MA200 Compact, opening opportunities in fully automated semiconductor and micro-system production using SMIF boxes as standard equipment.