Photomask Processing Platform

ASx Series

The ASx Series is the photomask processing platform for 250nm to 90nm technology nodes. With over 200 systems installed, the ASx Series has a proven track record in nearly every captive and merchant mask shop around the world.  Customers depend on ASx Series for its reliability, stability and performance to meet critical challenges of defect-free processing of masks exposed to 248nm and 193nm lithography. ASx Series platforms are the default choice for photomask manufacturing processes:  Bake, Develop and Clean.

more

Downloads & Contact