ACS200Plus

Modular Spin / Spray Coating and Developing Cluster for Volume Production

The ACS200Plus is a modular and automated cluster system designed to meet manufacturers' needs for clean, reliable, high throughput, and modular photolithography processing. SUSS MicroTec ACS200Plus systems can be equipped with sender/receiver cassette stations and modules for HMDS vapor priming, spin coating, spray coating, aqueous or solvent based developer processing, baking and cooling. Each process module comes in an individual Dock & Lock frame. This enables an easy, fast and uncomplicated upgrade of modules in the field. 

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