AltaSpray Coating Module

Automated Spray Coater for High Topographies

SUSS MicroTec's proprietary AltaSpray coating technology is a unique resist deposition method that is capable of producing highly uniform resist films on different 3-D microstructures.



Enabling GYRSET Coating Technology

The GYRSET rotating cover plate principle enables a unique turbulence-free and solvent rich atmosphere above the substrate during coating, thereby significantly reducing the influence of ambient temperature and humidity on the processing results.