Axiss Motorized Syringe Dispense System

Add Dispense Capability to your System

The axiss motorized syringe is the ideal dispense system for all users with applications, where only small resist amounts are available, used or needed.


AltaSpray Coating Module

Automated Spray Coater for High Topographies

SUSS MicroTec's proprietary AltaSpray coating technology is a unique resist deposition method that is capable of producing highly uniform resist films on different 3-D microstructures.



Enabling GYRSET Coating Technology

The GYRSET rotating cover plate principle enables a unique turbulence-free and solvent rich atmosphere above the substrate during coating, thereby significantly reducing the influence of ambient temperature and humidity on the processing results.