CB200M

More information

Patent pending CB technologies Pressure Column Design, Rigid Superstructure, and Symmetric Top and Bottom Heater Design are incorporated into the CB200M.

Product Features & Highlights

• Use the CB200M with cart loader for development, then remove the loader and dock the CB200 module onto a CBC200 cluster tool for full production
• Patent pending CB technologies:
• Pressure column design
  • Promotes pressure uniformity across entire surface of wafers
• Rigid superstructure
  • Isolates load support structure from process chamber
• Symmetric top and bottom heater design
  • Multi-Zone Heating eliminates conductive heat losses