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BA300UHP

Ultra High Precision Bond Aligner Module

The BA300UHP Ultra High Precision bond aligner module, compatible with the XBC300, can be used to achieve submicron alignment accuracy in Cu-Cu bonding, polymer bonding and fusion bonding.

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CB Wafer Bonding Module

200mm-300mm Production Wafer Bonder for 3D Interconnect and Advanced MEMS Manufacturing

The CB200 and CB300 bond chamber modules offer exceptional pressure and temperature uniformity and boast ultrafast heating and cooling for reduced bond cycle time, saving time and money.

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