Delta12AQ
12" Spray Develop System
The Delta12AQ meets all requirements for up to date spray developing of substrates up to ø 12" (ø300mm) or substrates / masks up to 9"x9" (230x230mm).
A wafer cleaning option is available on request.
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The Delta12AQ meets all requirements for up to date spray developing of substrates up to ø 12" (ø300mm) or substrates / masks up to 9"x9" (230x230mm).
A wafer cleaning option is available on request.
more