Delta12L

Manual 12" Metal Lift-off System

The Delta12L meets all expectations of a modern solvent spin processor for substrates up to Ø 12 (ø 300 mm) or substrates/masks up to 9"x9" (230x230 mm), Applications such as Lift-off with NMP or solvent develop (including but not limited to Aceton), resist strip and clean are supported by various dispense options like high pressure spray (up to 120bar) or by media recycling for cost saving. Fragile substrates (e.g. InP, GaAs) can be processed with extremly high yield.

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