UV-NIL Imprinting of Sub-50nm Resolution
UV-NIL is a low-cost production technology that is based on UV-curing. It has been developed as a cost-effective alternative to high-resolution e-beam lithography to print nanometer sized geometries. UV-NIL solutions may be the enabling technique for next generation semiconductor, MOEMS, NEMS and optoelectronic technology. The MA/BA8 single sided imprint UV-NIL toolkit can be field upgraded with very limited effort, offering a straightforward upgrade path for SUSS MicroTec customers to enter the nano world.