Knowledge Shared - SUSS report


Our biannual customer magazine SUSS report provides you with an insider update on innovations and trends in equipment solutions for the semiconductor and related industries. You will find exciting technical publications as well as praxis-orientated reports and personal notes by our experts.

Have a look in our latest SUSS report issue as well as in our archive.

We are happy to share with you the latest issue of our customer magazine „SUSS report“.


  • Editorial – F. Averdung, President and CEO of SUSS MicroTec
  • 50 Years of SUSS Mask Aligner
  • MPT Coating Service Now Available from Compugraphics Jena
  • Auto-Alignment Insights
  • Extending the Ruthenium Capping Layer Life Time of Extreme Ultra-Violet Lithography Photomasks in Physical Force Cleaning
  • 3D Topography Mask Aligner Lithography Simulation
  • Alignment Accuracy in a MA/BA8 Gen3 Using Substrate Conformal Imprint Lithography (SCIL)
  • CMOS Compatible Hermetic Wafer Level Packaging For Inertial MEMS


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