Issue 01/2016

We are happy to share with you the latest issue of our customer magazine „SUSS report“.

Our customer magazine SUSS report provides you with an insider update on innovations and trends in equipment solutions for the semiconductor and related industries. You will find exciting technical publications as well as practice-oriented reports and personal notes by experts of the industry.

Have a look in our latest SUSS report issue as well as in our archive. The articles are also available as technical publications.

The 2016 annual edition is also available as hardcopy. Contact us for a free copy.


High Precision Dispense System

Presisely controlled dispensing of photoresist is one of the key process steps in photolithography. Beside basic requirements like a bubble free dispense, the accuracy and flowrate profile influence the uniformity of a coating. Up to date, high precision dispensing was an exclusive domain of positive displacement pump-systems. SUSS MicroTec recently introduced a pressure based dispense system, which breaks into this area.

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UV-LED Lamp House – Light Source of the Future

The new, innovative UV-LED lamp house concept of SUSS MicroTec combines high efficiency and flexibility with eco-friendliness and reduced complexity and represents a trendsetting alternative to common lamp houses. It supports full process capability for today’s lithography users and enables tomorrow’s process technologies.

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