Universal Coating System for Wafers up to 300mm
The Delta12RC is the ideal platform for manual and semi-automated spin coating processes in R&D and low-volume fabrication. Substrates up to 300mm in diameter and square substrates up to 9" edge length can be processed.
SUSS MicroTec Delta12RC offers GYRSET® closed cover coating technology. Open bowl coating is possible with programmable z-height for defined distance between the substrate and cover. The GYRSET® closed cover coating technology offers enhanced uniformity and significant cost savings of up to 60 percent, depending on resist chemistry.more