LabSpin6 and LabSpin8
Laboratory Coat and Develop Solution for Wafers up to 150 and 200mm
SUSS MicroTec‘s LabSpin platform represents the next generation of manual coater/developer systems that have been developed specifically for laboratory and R&D. Designed for a variety of photolithography chemicals, LabSpin systems provide uniform, precise and repeatable coating results on the wafer through its advanced cup design.
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ECTC 2012
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