Coater/Developer

スピン&スプレーコータ / Developer

Meeting Your Needs with Comprehensive Coating and Developing Solutions

SUSS MicroTec Spin Coaters and Spray Coaters have become synonymous with premium performance, ease of use, flexibility and enhanced coating mastery. With a complete line of compact and user-friendly resist coating equipment from economic low-volume laboratory tools to high-end production systems up to 300 mm SUSS MicroTec coaters enable the formation of resist layers ranging from below 1 µm to over 500 µm in the same process bowl.

Automated Spin Coater, Spray Coater & Developer

Manual Spin Coater, Spray Coater & Developer