Automated Photomask Processing

ASx Series

The ASx series is SUSS MicroTec’s photomask processing platform for 250nm to 90nm technology nodes with advanced bake, develop and clean technologies. The series offers reliability, stability and performance to meet critical challenges of defect-free processing of masks exposed to 248nm and 193nm lithography.

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Highlights

  • Highest first pass cleaning yield, resulting in extended mask life
  • Low cost of ownership with small footprint (1200 x  1200mm)
  • High reliability and uptime

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