Compound Semiconductors

Innovative Process Solutions for LEDs

LEDs (Light Emitting Diode) are based on compound semiconductors and widely used in optoelectronic and communication products such as portable electronics and automotive illumination. Other applications include optical communications, photovoltaics and power semiconductors.

Substrates for these applications include such materials as Gallium Arsenide (GaAs), Indium Phosphide (InP), and Silicon Carbide (SiC). All of these compound semiconductor materials pose specific challenges to the equipment set, whether it be wafer size, fragility or even porosity of the material. SUSS MicroTec equipment is specially engineered for these materials and incorporates specialized hardware such as coaters optimized for LED manufacturing, end effectors, exposure tools or optical sensors for handling or pre-aligning these unique wafers. Quick-exchange tooling sets are available for customers who need to frequently accommodate varying wafer sizes or types.