Compound Semiconductors
Innovative Process and Test Solutions for LEDs and RFICs
Compound semiconductors, comprised of elements from two or more different groups of the periodic table such as III-V, II-VI and IV-VI semiconductors, are widely used in optoelectronic and communication products. A large segment of compound semiconductors is wireless communications, with applications in RFICs (Radio Frequency Integrated Circuit) for mobile/cellular telephones and base stations, for instance. Another large segment belongs to illumination, including LEDs (Light Emitting Diode), with a growing range of applications in consumer markets such as portable electronics and automotive illumination. Other applications include optical communications, photovoltaics and power semiconductors.
Substrates for these applications include such materials as Gallium Arsenide (GaAs), Indium Phosphide (InP), and Silicon Carbide (SiC). All of these compound semiconductor materials pose specific challenges to the equipment set, whether it be wafer size, fragility or even porosity of the material. SUSS equipment is specially engineered for these materials and incorporates specialized hardware such as coaters optimized for LED manufacturing, end effectors, exposure tools or optical sensors for handling or pre-aligning these unique wafers. Quick-exchange tooling sets are available for customers who need to frequently accommodate varying wafer sizes or types.
In addition, wafer-level test systems from engineering to production test are specially designed by SUSS to integrate RF and microwave measurement equipment (HF probes, cables, VNAs, etc.) or optoelectronic stimulation and detection tools (integrating spheres, pattern generators, etc.) to provide the highest measurement accuracy matched with the customer’s throughput requirements. SUSS also has complete test solutions for power semiconductors and photovoltaics.
