Microlens Imprinting for Micro Optical Applications

Demand is growing for micro optics in 200mm wafer technology. Well-established processes from MEMS and semiconductor industry allow manufacturing of almost any micro-optical structure shape. SUSS Microlens Imprint Lithography (SMILE) uses soft stamps to imprint high-quality microlens arrays in UV-curable polymers on 8" glass wafers. Typical applications are Wafer-Level Cameras (WLC) for mobile phones and miniaturized image sensors. Beside stamp quality and material characteristics, accurate wedge error compensation and gap setting are important for lens replication with imprint lithography. The SUSS MicroTec MA/BA8 Gen3 provides an active gap setting system using piezo-electric linear actors, a highly accurate gap measurement system and a force detector. The precise double-sided microlens imprinting is realized with an exact laterally and axially alignment of the stamp, both with sub-micron precision.

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8“ lens master (brass) and imprinted lens replica of microlenses on a 8“ wafer. Imprinted with a SUSS MicroTec MA/BA8 Gen3 Mask Aligner. Courtesy:SUSS MicroOptics, Neuchâtel

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Double side imprinted microlens wafer. Imprinted with a SUSS MicroTec MA/BA8 Gen3 Mask Aligner. Courtesy:SUSS MicroOptics, Neuchatel

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Double side imprinted microlens wafer. Imprinted with a SUSS MicroTec MA/BA8 Gen3 Mask Aligner. Courtesy: SUSS MicroOptics, Neuchatel