Standard Photoresists

SUSS Lithography systems are able to process all standard photoresists and photosensitive polymers such as BCB. SUSS coating systems are able to deliver consistently uniform results for all kinds of applications. Their unique printing capability make SUSS mask aligners the tool of choice for many existing and emerging applications.

Main Applications

• SemiconductorsDRAM, Cameras, Displays (DLP), Analogs, Discretes
• Compound SemiconductorsLEDs, Laser Dioders, Filters, Photovoltaics, Power Devices
• MEMSInk Jet Heads, Pressure Sensors, RF-MEMS, Accelerometers, Gyroscopes, Bio-MEMS, MOEMS, Probe cards, Read-Write Heads