Spin Coaters & Spray Coaters

Meeting Your Needs with Comprehensive Coating/Developing Solutions

SUSS MicroTec Spin Coaters / Spray Coaters have become synonymous with premium performance, ease of use, flexibility and enhanced coating mastery. With a complete line of compact and user-friendly resist coating equipment from economic low-volume laboratory tools to high-end production systems up to 300mm SUSS MicroTec coaters enable the formation of resist layers ranging from below 1µm to over 100µm in the same process bowl.

Automated Spin Coaters and Spray Coaters

Highly automated, modular spin and spray coaters for wafers up to 300mm - 3D-Integration, Wafer Bumping, Wafer Level Packaging, MEMS, Compound Semiconductor.

Gamma (up to 200mm)
ACS200Plus (up to 200mm)
ACS300 Gen2 (up to 300mm)

Manual Spin Coaters & Spray Coaters

The Delta series is the perfect tool for R&D, universities and start-up companies - MEMS, wafer level packaging, 3D-Integration, compound semiconductor.

Delta 80RC (up to 200mm)
Delta 12RC (up to 300mm)

The SUSS MicroTec patent pending AltaSpray approach delivers consistent conformal coatings over various structures having a sidewall slope from 0 to 90° and even more.

Delta Altaspray (up to 200mm)

Integrated Lithography Cluster

SUSS Lithography Clusters are integrated coat, bake, expose, develop solutions that especially used in volume production of components for compound semiconductor, wafer-level packaging or MEMS applications.

LithoPack300 (up to 300mm)
LithoFab200 (up to 200mm)

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