Backside Emission Probe Systems
Unsurpassed Flexibility for Backside Emission Microscopy
Features and Benefits
- Unique design compatible with bottom-up emission microscope systems from all major vendors
- Dedicated chucks for photo and thermal emissions handle 200 & 300mm wafers as well as wafer parts and single chips
- Topside mode option for highest flexibility (PA300BEP only)
- Worlds first backside emission probe station which can handle vertical probe cards with MicroAlign™ Technology (PA300BEP only)
- Designed for maximum stability for long-term emission tests
The new SUSS Backside Emission Probe Systems (patent pending) are versatile, high-performance probe systems that bring together the advantages of a probe station and a bottom-up observation system.
Backside Emission Probe Systems from SUSS are designed for probing different substrates by contacting the device under test (DUT) with needles from the contact side (top side) and inspect or stimulate the backside (bottom side) with an emission detection unit. The probers are compatible with all bottom-up observation systems from all major vendors.
The PA300BEP is the world's first and only probe station for emission microscopes that can handle vertical probe cards by using MicroAlign™ Technology.
