Dedicated Probe Systems
SUSS has designed solutions that are dedicated to specific test applications or testing specific devices. Although these solutions are dedicated, they retain the flexibility and modularity that every SUSS probe station offers. SUSS has dedicated solutions for wafer-level reliability (WLR) testing, MEMS testing and materials research as well as for failure analysis (especially emission microscopy).
Wafer-Level Reliability Applications
PM8WLR
Wafer size: ≤ 200mm
› read more...
Main Applications: PCR
PM300WLR
Wafer size: ≤ 300mm
› read more...
Main Applications: PCR
MEMS & Material Research Applications
Vacuum Probe Systems
Wafer size: ≤ 300mm
› read more...
Main Applications: DCM, FA, PCR, PT
Cryogenic Probe Systems
Wafer size: ≤ 300mm
› read more...
Main Applications: DCM, FA, PCR, PT
Pressure Probe Systems
Wafer size: ≤ 300mm
› read more...
Main Applications: DCM, FA, PCR, PT
Failure Analysis Applications
Double Side Probe Systems
Wafer size: ≤ 300mm
› read more...
Main Applications: FA (emission microscopy), DCM
Backside Emission Probe Systems
Wafer size: ≤ 300mm
› read more...
Main Applications: FA (emission microscopy), DCM
Test Head Probe Systems
Direct docking to test head
› read more...
Main applications: FA



