Double Side Probe Systems
Excellent Solution for Emission Microscopy and Much More
- Full access to both sides of the DUT
- Available for all emission microscopes from leading vendors
- Submicron resolution and stability
- Very flexible design
- Compatible with all SUSS accessories
SUSS' patented Double Side Probe Systems (DSP) are the technology leaders for all applications requiring access from both the top and back side of the wafer. Working in close cooperation with the leading suppliers of emission microscopes, SUSS has developed systems are an invaluable tool for defect localization in design verification and failure analysis when the DUT has multiple layers of metallization, flip-chip or lead-on-chip packaging.
SUSS designs and manufactures both manual and semiautomatic DSP systems for all substrate sizes spanning from a single chip to 300 mm wafers.
The SUSS DSP systems are also suited for MEMS test. In a recent case, SUSS developed a 200 mm system which provided sound stimulus from below the wafer with electrical signal analysis occurring from the topside.
