Pressure Probe System
Unique System for Testing up to 50 bar Absolute Pressure
Features and Benefits
- Save costs – on-wafer test before the devices are packaged
- Test your devices at absolute pressures from 100 mbar to 50 bar
- Create a contained, humidity-controlled and/or controlled-gas atmosphere
- Easy wafer handling and positioning of the manipulators
- Full range of accessories for a complete testing solution
The pressure probe system enables testing of pressure sensors and any devices that may need to operate in a different gas atmosphere or at a different humidity. Instead of packaging the device and then testing for bad dies, the pressure probe system tests at wafer level before packaging. This reduces manufacturing costs and time to market.
The system supplies absolute pressure from 100 mbar to 50 bar, and also supports testing in a controlled gas atmosphere combined with controlled humidity. The massive, CE-certified chamber has a volume for accommodating substrates up to 200 mm with plenty of space for manipulators and other accessories. An optional temperature chuck can be integrated for testing at temperatures from -60 to 200°C.
For differential pressure sensor test, SUSS offers the patented Pressure Probe Module.
