AP200
Fully-Automated 200mm Analytical Probe System
Features and Benefits
- A flexible, fully-automated analytical probe system
- System can be customized for specific application needs
- Specially designed to handle sensitive substrates
The SUSS AP200 combines the versatility of an analytical probe station with the throughput of a loader module. Specially designed to carefully handle the most sensitive of substrates, the AP200 is ideally suited for probing MEMS, SAW filters and other devices that need a high level of customization.
The AP200 consists of cassette stations with a robotic wafer loader, optional pre-aligner, probe station, test instrumentation and software. Its flexibility enables use as a semiautomatic analytical station during the day before automatically testing a batch of substrates overnight or at weekends: monitoring can even be undertaken via Internet if desired.
The AP200 can be configured for a variety of applications and enhanced with SUSS ProbeShield® Technology.
