PM500 Manual Probe System
Flat Panel Display Testing Made Easy
Features and Benefits
- Up to 500mm x 500mm square and round subtrates on the same chuck
- Highest flexibility – can be configured for many applications RF, FA or WLR
- Superior mechanics for highest degree of stability
- Individual locking of X and Y axis with magnetic locks and vacuum brake
- Ergonomic, low profile design
With its built-in square chuck, the SUSS PM500 is the ideal probe system for failure analysis (FA) tests of flat panel displays (FPDs) up to 500 x 500 mm.
Vacuum grooves in the standard and thermal chuck surface give you the freedom to test round wafers and substrates as well as square substrates with the same probe system. This ensures that your requirements from device characterization to wafer-level reliability are met with the highest degree of precision and accuracy available on the market.
The superior mechanics of the prober are the basis for a stable system setup regardless of your application. The PM500 can be configured without a microscope bridge to fit systems with its own microscope stage and dark box, for example when used in conjunction with emission microscopy systems.
The complete range of your existing SUSS accessories is compatible with the PM500 probe system.
