PA300 Semiautomatic Probe System

Highest Positioning Accuracy for 300mm Testing

Features and Benefits

  • Best probe station for testing up to 300 mm
  • Ideal for failure analysis and device characterization and modeling (DC to 325 GHz)
  • Submicron probing capability
  • Intuitive, user-friendly control system
  • Vast array of accessories for a complete, customized test solution

SUSS MicroTec was the first manufacturer of on-wafer test systems to introduce a 300 mm probe station. Rigorous research and development resulted in a high-precision probe system, which is manufactured using highly-skilled labor and quality components. Whether it be failure analysis or device characterization and modeling, the PA300 is perfect for testing devices from DC to 325 GHz.

The industry-leading ProberBench™ control system gives you the ability to fully operate the probe system with or without a PC. When operated with a PC, the intuitive, user-friendly interface of the software suite gives you powerful options to maximize the effectiveness of the probe system.

For a complete wafer-level test solution, the PA300 can be configured with the vast array of accessories from SUSS to meet exactly your testing requirements. Plus, you save money because your existing SUSS accessories are fully compatible with the PA300 probe system.