Delta 12L
Manual 12" Metal Lift-off System
Features and Benefits
- Metal Lift-off, Develop, Clean, Strip
- Up to 4000 rpm
- Programmable recipes
- High pressure spray and megasonic dispense option
- Laptop option
The DELTA 12 L meets all expectations of a modern solvent spin processor for substrates up to Ø 12 (ø 300 mm) or substrates/masks up to 9"x9" (230x230 mm), Applications such as Lift-off with NMP or solvent develop (including but not limited to Aceton), resist strip and clean are supported by various dispense options like high pressure spray (up to 120bar) or by media recycling for cost saving. Fragile substrates (e.g. InP, GaAs) can be processed with extremly high yield.
