print «back

Mask Aligner

Unmatched Precision for Thin and Thick Film Applications

The SUSS Mask Aligner has become synonymous with superior quality, accuracy, and high quality exposure equipment. SUSS MicroTec offers a complete range of mask aligners for high-end fab automation, volume production and R&D environments alike. The new mask aligner generation from SUSS processes wafers up to 300mm and can be equipped with technologies that significantly increase throughput, achieve 1 micron resolution and sub-micron overlay and significantly reduce lithography costs. SUSS Mask Aligners provide a flexible and economic alternative to expensive stepper technology and are regarded as the system of choice for many enabling technologies such as MEMS, Wafer Level Packaging or Compound Semiconductors.

Production Mask Aligners

Manual Mask Aligners