SUSS AFP Probe
Submicron Atomic Force ProbeHead™
Features and Benefits
- Easy probe placement below 0.25 µm, breaking the barriers imposed by normal microscope methods
- Minimal DUT impact and 3D nanometer imaging
- Up to 4 probes can be used simultaneously
- System supports passive RF, active RF and DC probe tips
- AFP Probe is easily moved from one probe station to another
The SUSS AFP Probe offers break-through scanning probe technology implemented on the simplicity of a probe station environment. This contact probe utilizes the unique advantages of Atomic Force Microscopy (AFM) to enable visualization and placement of the probe accurately on submicron features for both front and backside probing. The computer controlled probe puts an end to DUT damage and heavy loading of circuits. The SUSS AFP Probe offers the user the ability to catch one-time and spurious events, yet still allows for high bandwidth, low load measurements. Unlike traditional AFM’s, this probe has been designed from the start for probing packaged parts and wafers.
Tip alignment is automated to allow the user to focus on the job and not on the tool. Imaging is performed by touching a single button and probe placement is as simple as moving the cursor on the screen.
