Microlens Imprinting for micro Optical Applications
Demand is growing for micro optics in 200mm wafer technology. Well-established processes from MEMS and semiconductor industry allow manufacturing of almost any micro-optical structure shape. SUSS Microlens Imprint Lithography (SMILE) uses soft stamps to imprint or emboss high-quality microlens arrays in UV-curable polymers on 8_ glass wafers. Typical applications are Wafer-Level Cameras (WLC) for mobile phones and miniaturized image sensors. Beside stamp quality and material characteristics, accurate wedge error compensation and gap setting are crucial for imprint lithography. The SUSS MA/BA8 provides an active wedge error system that employs piezo-electric linear actors, a highly accurate gap measurement system and a force detector. The precise double-sided microlens imprinting is realized with an exact laterally and axially alignment of the stamp, both with sub-micron precision.
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T8“ lens master (brass) and imprinted lens replica of microlenses on a 8“ wafer. Imprinted with a SUSS MA8 Gen.3 Mask Aligner. Courtesy: SUSS MicroOptics, Neuchâtel
Double side imprinted microlens wafer. Imprinted with a SUSS MA8 Gen.3 Mask Aligner. Courtesy: SUSS MicroOptics, Neuchatel
Double side imprinted microlens wafer. Imprinted with a SUSS MA8 Gen.3 Mask Aligner. Courtesy: SUSS MicroOptics, Neuchatel
