SUSS MicroTec's Performance Enhancement Program
The keys to maximize performance of your equipment includes skilled operators, an understanding of how your system functions and an appreciation of what it should have in the ways of support your equipment.
The Performance Enhancement Program from SUSS MicroTec is a worldwide customer support program mainly targeted at our lithography systems. It offers customized maintenance and training services to ensure that your machine will perform better, last longer, and reduce your total cost of ownership. Our system upgrades will help you to significantly enhance performance and process flexibility of your SUSS MicroTec Equipment.
Our Customer Support Program incorporates three key elements of performance enhancement:
Service Offerings
- System Health Check
- Preventive Maintenance
- Spare Parts Packages
Training
- SUSS MicroTec Equipment
- PatMax Pattern Recognition
- Process Development
System Upgrades
Mask Aligner
- Software Upgrade for MA300Plus
- UV Nanoimprint Lithography
- DirectAlign for MA150/200CC
Coater
- Axxis Motorized Syringe Dispense System
