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- MA1006
Manual Mask Aligner - MA1006
Features and Benefits
- From small pieces up to 6”
- State of the Art for low budget
- Very flexible, extremely robust
Wafer size | max. 150 mm Ø |
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Substrate size | Max. 150 x 150 mm |
Thickness | 0 –5 mm |
Mask size | max. 7” x 7” |
Exposure optics | |
UV400: 350 nm – 450 nm | Hg-lamp: 350W / 1000W |
UV300: 280 nm – 350 nm | Hg-lamp: 350W / 1000W |
Uniformity | ± 5% for 150 mm wafers |
Splitfield Video Camera system | |
Image storage system | SUSS MicroTec DSS02 |
Camera | CCD 2/3” chip |
Monitor | Screen 10” – 15” |
Optics | |
Zoom factor nom. | 5x 35x |
Zoom factor visual - 14” monitor | 150x – 1000x |
Exposure program | |
Proximity |
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Soft contact |
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Hard contact |
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Vacuum contact |
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