SUSS MicroTec's ASx Series is the photomask processing platform for 250nm to 90nm technology nodes.
SUSS MicroTec mask aligners are well known for their quality, performance, and reliability. The BA200 Gen2 process module uses the same perfected wafer alignment technology as that used in thousands of SUSS MicroTec mask aligners...
Dedicated Mask Aligner Solution for High Volume Production of Compound Semiconductors Devices
MaskTrack is a multi-purpose, fully-automated platform for imprint mask cleaning and critical photomask processing: Post Exposure Bake, Develop, Strip and Clean.
SUSS MicroTec's, MaskTrack Pro is family of products that solves Next Generation Lithography roadmap requirements for Clean, Bake and Develop.