Automated Wafer Bonding Cluster System
Combining the best of Gamma and ACS200Plus platforms
Superior Spin and Spray Coating Cluster for Volume Production
Production Spin Coat / Develop Cluster for Wafer Level Packaging
SUSS MicroTec's ASx Series is the photomask processing platform for 250nm to 90nm technology nodes.
SUSS MicroTec mask aligners are well known for their quality, performance, and reliability. The BA200 Gen2 process module uses the same perfected wafer alignment technology as that used in thousands of SUSS MicroTec mask aligners...
Ultra High Precision Bond Aligner Module
Precision Bond Alignment from the Industry Experts
200mm-300mm Production Wafer Bonder for 3D Interconnect and Advanced MEMS Manufacturing
High Performance Wafer Bonding for advanced MEMS, 3D stacking and LED applications
200mm Production Wafer Bonder for 3D Interconnect and Advanced MEMS Manufacturing
CL200 Wafer Cleaning Module /CL8 Cleaner/Bonder
Universal Coating System for Wafers up to 300mm
Manual Spray Coater for High Topographies
12" Spray Develop System
Manual 12" Metal Lift-off System
Projection Scanner
Fully Automated Top-to-Bottom Side Alignment Verification System
Manual Top-To-Bottom Side Alignment Verfication System
Excimer Laser Processing System
Spin - / Spray Coat and Wet Processing Platform for Volume Production and R&D
Proven reliability and performance redesigned to meet today’s challenges
Hot Plate
Laboratory Coat and Develop Solution for Wafers up to 150 and 200mm
Lithography Cluster for Compound Semiconductor and MEMS Devices
Lithography Cluster for Wafer Level Packaging
The Lithography Benchmark from R&D to 3D MEMS Production
150mm Semi-automated Aligner for Industrial Research and Operator-assisted Production
The Dedicated Solution for Industrial Research and Operator Assisted Alignment
Dedicated Mask Aligner Solution for High Volume Production of Compound Semiconductors Devices
The Lithography Solution for LED Manufacturing and MEMS
Combining High Resolution with High Throughput and Submicron Precision
Highly Automated Mask Aligner Platform for 300mm and 200mm Wafers
MaskTrack is a multi-purpose, fully-automated platform for imprint mask cleaning and critical photomask processing: Post Exposure Bake, Develop, Strip and Clean.
SUSS MicroTec's, MaskTrack Pro is family of products that solves Next Generation Lithography roadmap requirements for Clean, Bake and Develop.
Refractive and diffractive Micro-Optics
State-of-the Art R&D Solution for Small Substrates and Pieces
Resist Coat and Develop Platform
Wafer Bonding Process Module
Precision Wafer Bonding Solution
Cost effective, High Precision Wafer Bonder
Solid State Laser Processing System
Process Development and Production for Advanced 3D Integration Applications
Permanent Bonding and Debonding / Cleaning Solution for 3D Integration Processes
Universal Temporary Wafer Bonder for High Volume Manufacturing
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