濕式製程系統
金屬剝除、顯影、清潔、去光阻
SUSS提供了適用於不同濕式製程程序，例如金屬剝除、噴霧式顕影、清潔或光阻去除的設備。SUSS的濕式製程系統是適合研發、大學院校或剛成立的 公司的理想設備。
Automated Spin Coaters and Spray Coaters
Highly automated, modular spin and spray coaters for wafers up to 300mm - 3D-Integration, Wafer Bumping, Wafer Level Packaging, MEMS, Compound Semiconductor.
Gamma (up to 200mm)
ACS200Plus (up to 200mm)
ACS300 Gen2 (up to 300mm)
Manual Wet Processing Equipment
The Delta series offers a variety of wet processes such as spray develop, lift-off or puddle develop. Delta systems are the perfect tool for R&D, universities and start-up companies for MEMS, wafer level packaging, 3D-Integration, compound semiconductor.
Delta 12AQ (up to 300mm)
Delta 12L (up to 300mm)