Auto-Alignment Insights – Part 2: Case Studies

This article is the second part of the short series of articles which started in issue 01/2013 of this magazine. The series focuses on pattern recognition and alignment in SUSS mask aligners. It is meant as a guideline especially for beginners in the fi eld of pattern recognition, but even more experienced users might fi nd one or the other aspect about pattern recognition which is new to him or her. This second part of the series highlights the most common alignment reliability issues using case studies. Based on the analysis of the cases promising measures to improve the alignment reliability in such cases are suggested.

See also: Auto-Alignment Insights - Part 1