SUSS MicroTec - UK Lithography Conference

We welcome you and your colleagues to register and attend the first SUSS MicroTec "UK Lithography Conference" designed to educate, inform and to provide networking opportunities with other participants from research and industry.

The event is being hosted by Rutherford Appleton Laboratory and is free for all respective delegates (refreshments, lunch and parking also included).

The event is organized by Inseto. Inseto are the official UK, Irish and Nordic representative for SUSS MicroTec.



1. Space for RAL Lab tours is limited, please register with the appropriate ticket type, if you are interested in attending a tour.
2. All spaces subject to confirmation.
3. Please pass on details of the event to any interested party.

Need more information: Matt Brown, Inseto +44 1264 334505 /




08:30 Registration, Networking, Tea & Coffee
09:25 Session One: Surface Preparation
- Substrate selection & mask design
- Novel resins for classic & e-Beam lithography
- Recent developments in coating technology & launch of the LabCluster
11:00 Session Two: Exposure
- Mask Aligner: Tips and innovative techniques to improve resolution (Fresnel Zone Plate)
- Improving proximity resolution using diffracting elements
- Updated results about LED Lamp House on manual & automatic mask aligner
12:30 - 13:30 Lunch & Networking
13:30 am Session Three: Imprint / Applications
- Comparative presentation of imprint material & their application & solution to improve life time & COO of stamp
- Imprint of monolithic lenses
- Application case study: Swansea University
15:00 RAL Lab Tours
16:00 Finish

The content is subject to change.

Jul. 04 - Jul. 04, 2019
Chilton, United Kingdom