MPT Coating Service Now Available from Compugraphics Jena GmbH

MPT™ Technology (Mask Protection Technology) was developed by Motorola Labs in the 1990s: In order to reduce the usually high mask cleaning frequency when exposing wafers by contact printing a thin film of a fluorinated hydrocarbon polymer is spin coated onto the photomask. Similar to a Teflon coating this fluorinated polymer reduces the surface energy of the mask making it more difficult for resist residues and particles to stick to it. The transparency of the mask for broadband or deep UV wavelength is not compromised and the film thickness of approximately 100 nm is small enough to ensure contact printing results comparable to unprotected photomasks.