Optimizing Spray Coater Process Parameters

Spray coating technology is known for being affected by many different process parameters that,  combined  together  in  an  ensemble,  would  lead  to  a  variety  of  different  coating  outcomes.  In  the  present  article,  a  systematic  analysis  on  how  to  optimize  spray  coating processes, based on the chemical and physical origin of the behaviour of the resist over high topography structures will be discussed.